基于激光-微筆直寫的靜電驅(qū)動(dòng)可變電容制備技術(shù)研究.pdf

1、華中科技大學(xué)碩士學(xué)位論文基于激光微筆直寫的靜電驅(qū)動(dòng)可變電容制備技術(shù)研究姓名：胡昆侖申請學(xué)位級(jí)別：碩士專業(yè)：物理電子學(xué)指導(dǎo)教師：李祥友20090501AbstractRFMEMStunablecapacitshavebroaddevelopmentprospectssoawiderangeofattentionhasbeenattractedtomanyresearchinstitutionsatdomesticabroadinrecen

2、tyears.LasermicrocladdingtechnologymicropendirectwritingtechnologyshowtheirpowerfulsuperiitybecomeanimptanttechnologyinthefieldofMEMSmicrofabrication.WiththesupptofNational“863”HiTechResearchDevelopmentProgramofChinaaRFM

3、EMSelectrostaticdriventunablecapacitwithasuspendedmovabletopelectrodeafixedbottomelectrodewasdesignedmanufacturedinthispaper.Gold(Au)conductpastewaschosenassuspendedstructurallayerthefixedelectrodethebottomelectrodemater

4、ialpolyie(PI)colloidwaschosenassacrificiallayermaterialquartzglasswaschosenasthesubstratematerialrespectively.UsingtheMultifunctionalDirectwriteMicromanufacturingSystemwhichwasdevelopedbyourlabatythefixedthebottomelectro

5、dewasfabricatedbylasermicrocladdingtechnologytheAustructurallayerPIsacrificiallayerswasfabricatedbymicropendirectwritingtechnologythesacrificiallayerPIwasetchedbyusingtheoxygenplasmadryetchingthustheelectrostaticdriventu

6、nablecapacitcanbeobtained.Theparametersprocesseswerediscussedinthispaper.Laserpowerdensityscanningspeedaretwoofthemostimptantprocessparametersoflasermicrocladdingwhichseverelyaffectthemicrocladdinglayerthicknessfilmperfm

7、anceitselectricconductivity.Theresultsshowedthatincreasingthelaserpowerdensityscanningspeedthelinewidthofmicrocladdinglayerwillbereducedwhilstthecladdinglayersquareresistancewillbeincreasedresultinbadelectricconductivity

8、.What’smethereexistslimitationscopefbothofthepowerdensityscanningspeedoverwhichcanhardlygetaperfectmicrocladdingconductLayer.Theperfmance(suchasabsolutecapacitancevoltagecapacitanceacteristicthequalityfact)wasalsotesteda